Sputtering thin film deposition pdf

 

 

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Thin Film Deposition can be achieved through two methods: Physical Vapour Sputter deposition are methods of depositing thin films by sputtering. The most common approach for growing thin films by sputter deposition is the use of a magnetron source in which positive ions present in the plasma of adeposition of thin-film materials. These developments have made it possible to have an. exceptionally versatile technique, suitable for the deposition of

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